<\/p>\n<\/p>\n
\u6458\u8981\uff1a<\/p>\n
\u968f\u7740\u79d1\u6280\u7684\u98de\u901f\u53d1\u5c55\uff0c\u534a\u5bfc\u4f53\u82af\u7247\u6210\u4e3a\u73b0\u4ee3\u7535\u5b50\u6280\u672f\u7684\u91cd\u8981\u7ec4\u6210\u90e8\u5206\u3002\u5728\u82af\u7247\u751f\u4ea7\u8fc7\u7a0b\u4e2d\uff0c\u6e05\u6d17\u5de5\u827a\u975e\u5e38\u5173\u952e\uff0c\u56e0\u4e3a\u5b83\u76f4\u63a5\u5f71\u54cd\u82af\u7247\u7684\u53ef\u9760\u6027\u548c\u8d28\u91cf\u3002\u672c\u6587\u4ece\u591a\u4e2a\u65b9\u9762\u6df1\u5165\u63a2\u8ba8\u534a\u5bfc\u4f53\u82af\u7247\u6e05\u6d17\u8bbe\u5907\u7684\u91cd\u8981\u6027\uff0c\u5206\u6790\u76ee\u524d\u6e05\u6d17\u884c\u4e1a\u7684\u6280\u672f\u8d8b\u52bf\u4e0e\u53d1\u5c55\u72b6\u51b5\u3002\u540c\u65f6\uff0c\u672c\u6587\u8fd8\u7b80\u5355\u4ecb\u7ecd\u4e86\u56fd\u5185\u7684\u6e05\u6d17\u884c\u4e1a\u9886\u5148\u4f01\u4e1a\u2014\u2014\u5df4\u6d1b\u4ed5\u96c6\u56e2\u2014\u2014\u5f00\u521b\u7684\u4e00\u4e9b\u5316\u5b66\u4e2d\u6027\u6e05\u6d17\u65b0\u6280\u672f\u7684\u5e94\u7528\u4e0e\u4f18\u52bf\u3002<\/p>\n
\u6b63\u6587\uff1a<\/p>\n
\u4e00\u3001\u82af\u7247\u751f\u4ea7\u4e2d\u7684\u6e05\u6d17\u5de5\u827a<\/p>\n
\u534a\u5bfc\u4f53\u6750\u6599\u6781\u5ea6\u654f\u611f\uff0c\u5bb9\u6613\u53d7\u5230\u6c61\u67d3\u7269\u7684\u5f71\u54cd\u800c\u5bfc\u81f4\u82af\u7247\u8d28\u91cf\u7684\u4e0b\u964d\u3002\u56e0\u6b64\u5728\u82af\u7247\u751f\u4ea7\u8fc7\u7a0b\u4e2d\uff0c\u6e05\u6d17\u5de5\u827a\u663e\u5f97\u5c24\u4e3a\u91cd\u8981\u3002\u6709\u6548\u7684\u6e05\u6d17\u53ef\u4ee5\u5927\u5927\u63d0\u9ad8\u82af\u7247\u7684\u8d28\u91cf\u548c\u53ef\u9760\u6027\u3002\u82af\u7247\u6e05\u6d17\u8fc7\u7a0b\u5206\u4e3a\u524d\u6bb5\u6e05\u6d17\u548c\u540e\u6bb5\u6e05\u6d17\u3002\u524d\u6bb5\u6e05\u6d17\u662f\u786e\u4fdd\u57fa\u677f\u8868\u9762\u5e72\u51c0\u7684\u5173\u952e\uff0c\u5b83\u5305\u62ec\u7269\u7406\u6e05\u6d17\uff08\u5982\u84b8\u6c7d\u6e05\u6d17\u6216\u6eb6\u6db2\u6e05\u6d17\uff09\u548c\u5316\u5b66\u6e05\u6d17\uff08\u5982\u9178\u6027\u6e05\u6d17\u6216\u78b1\u6027\u6e05\u6d17\uff09\u3002\u540e\u6bb5\u6e05\u6d17\u662f\u786e\u4fdd\u82af\u7247\u8868\u9762\u5e72\u51c0\u7684\u5173\u952e\uff0c\u5b83\u4e3b\u8981\u7528\u4e8e\u53bb\u9664\u5149\u523b\u5c42\u3001\u8680\u523b\u5242\u6216\u5176\u4ed6\u8868\u9762\u6c61\u67d3\u7269\u3002<\/p>\n
\u73b0\u5728\uff0c\u968f\u7740\u6e05\u6d17\u5de5\u827a\u7684\u4e0d\u65ad\u6539\u8fdb\u548c\u6280\u672f\u7684\u4e0d\u65ad\u63d0\u9ad8\uff0c\u534a\u5bfc\u4f53\u82af\u7247\u6e05\u6d17\u8bbe\u5907\u7684\u8d28\u91cf\u4e5f\u5f97\u5230\u4e86\u663e\u8457\u63d0\u5347\u3002\u5b83\u4eec\u80fd\u591f\u6709\u6548\u5730\u53bb\u9664\u82af\u7247\u8868\u9762\u7684\u5404\u79cd\u6c61\u67d3\u7269\uff0c\u4ece\u800c\u63d0\u9ad8\u82af\u7247\u8d28\u91cf\u548c\u53ef\u9760\u6027\u3002<\/p>\n
\u4e8c\u3001\u6e05\u6d17\u6280\u672f\u7684\u53d1\u5c55\u8d8b\u52bf<\/p>\n
\u5728\u5f53\u4eca\u4e16\u754c\uff0c\u6e05\u6d17\u884c\u4e1a\u5904\u4e8e\u5feb\u901f\u53d1\u5c55\u7684\u9636\u6bb5\u3002\u6e05\u6d17\u6280\u672f\u7684\u53d1\u5c55\u8d8b\u52bf\u4e3b\u8981\u6709\u4ee5\u4e0b\u51e0\u70b9\uff1a<\/p>\n
1. \u73af\u4fdd\u578b\u5316\u5b66\u6e05\u6d17<\/p>\n
\u4f20\u7edf\u7684\u6eb6\u5242\u6e05\u6d17\u6216\u673a\u68b0\u6e05\u6d17\u5177\u6709\u8f83\u5927\u7684\u73af\u5883\u6c61\u67d3\u548c\u7269\u8d28\u6d88\u8017\u3002\u56e0\u6b64\uff0c\u73af\u4fdd\u578b\u5316\u5b66\u6e05\u6d17\u6280\u672f\u6b63\u9010\u6e10\u6210\u4e3a\u6e05\u6d17\u5e02\u573a\u7684\u4e3b\u6d41\u3002\u5b83\u5229\u7528\u53ef\u518d\u751f\u6027\u548c\u73af\u4fdd\u6027\u8f83\u9ad8\u7684\u6eb6\u6db2\u8fdb\u884c\u6e05\u6d17\uff0c\u5927\u5927\u51cf\u5c11\u4e86\u73af\u5883\u6c61\u67d3\u548c\u5e9f\u5f03\u7269\u7684\u4ea7\u751f\u3002<\/p>\n
2. \u5fae\u673a\u7535\u7cfb\u7edf\uff08MEMS\uff09\u6e05\u6d17\u6280\u672f<\/p>\n
MEMS\u6280\u672f\u662f\u6700\u8fd1\u7814\u7a76\u7684\u70ed\u70b9\u9886\u57df\u4e4b\u4e00\uff0c\u5b83\u5728\u5404\u79cd\u4f20\u611f\u5668\u3001\u5149\u5b66\u5143\u4ef6\u548c\u5fae\u5c0f\u673a\u68b0\u7cfb\u7edf\u7b49\u65b9\u9762\u6709\u7740\u5e7f\u6cdb\u7684\u5e94\u7528\u3002\u7531\u4e8eMEMS\u5668\u4ef6\u5236\u9020\u7684\u590d\u6742\u6027\u548c\u7279\u6b8a\u6027\uff0c\u4f20\u7edf\u7684\u6e05\u6d17\u65b9\u6cd5\u65e0\u6cd5\u6ee1\u8db3\u5176\u6e05\u6d17\u8981\u6c42\u3002\u56e0\u6b64\uff0cMEMS\u6e05\u6d17\u6280\u672f\u5e94\u8fd0\u800c\u751f\u3002\u5b83\u4f7f\u7528\u4e86\u591a\u79cd\u6e05\u6d17\u65b9\u6cd5\uff0c\u5982\u7269\u7406\u6e05\u6d17\u3001\u5316\u5b66\u6e05\u6d17\u3001\u6c27\u5316\u6e05\u6d17\u3001\u5e72\u6cd5\u6e05\u6d17\u548c\u8d85\u58f0\u6ce2\u6e05\u6d17\u7b49\u3002<\/p>\n
3. \u8d85\u58f0\u6ce2\u6e05\u6d17<\/p>\n
\u8d85\u58f0\u6ce2\u6e05\u6d17\u6280\u672f\u662f\u6e05\u6d17\u884c\u4e1a\u4e2d\u7684\u91cd\u8981\u6280\u672f\u4e4b\u4e00\uff0c\u5b83\u4e3b\u8981\u662f\u5229\u7528\u9ad8\u9891\u8d85\u58f0\u6ce2\u632f\u52a8\u7684\u6548\u5e94\u6765\u6e05\u6d17\u3002\u6b64\u5916\uff0c\u8d85\u58f0\u6ce2\u6e05\u6d17\u6280\u672f\u8fd8\u53ef\u4ee5\u4f7f\u7c98\u9644\u5728\u82af\u7247\u8868\u9762\u7684\u6742\u8d28\u5265\u79bb\uff0c\u4ece\u800c\u6709\u6548\u5730\u964d\u4f4e\u710a\u63a5\u4e0d\u826f\u7684\u98ce\u9669\u3002<\/p>\n
4. \u771f\u7a7a\u6e05\u6d17<\/p>\n
\u771f\u7a7a\u6e05\u6d17\u4e3b\u8981\u662f\u5c06\u6e05\u6d17\u7269\u6599\u7f6e\u4e8e\u771f\u7a7a\u73af\u5883\u4e2d\u8fdb\u884c\u6e05\u6d17\u3002\u5b83\u4e3b\u8981\u7528\u4e8e\u5904\u7406\u4e0d\u5b9c\u4f7f\u7528\u6c34\u6216\u6c14\u4f53\u6e05\u6d17\u7684\u7ec4\u4ef6\u3002\u771f\u7a7a\u6e05\u6d17\u7684\u4f18\u70b9\u662f\u53ef\u4ee5\u6709\u6548\u6d88\u9664\u6c61\u67d3\u548c\u6d17\u8131\u5242\u6b8b\u7559\uff0c\u540c\u65f6\u4e5f\u53ef\u4ee5\u51cf\u5c11\u6c14\u4f53\u4ea7\u751f\u7684\u53ef\u80fd\u3002<\/p>\n
\u4e09\u3001\u5df4\u6d1b\u4ed5\u96c6\u56e2\u7684\u5316\u5b66\u4e2d\u6027\u6e05\u6d17\u65b0\u6280\u672f<\/p>\n
\u5df4\u6d1b\u4ed5\u96c6\u56e2\u662f\u4e00\u4e2a\u4e13\u4e1a\u7684\u5316\u5de5\u6e05\u6d17\u4f01\u4e1a\uff0c\u5b83\u62e5\u6709\u5b8c\u5584\u7684\u6e05\u6d17\u8bbe\u5907\u548c\u4e13\u4e1a\u7684\u6280\u672f\u56e2\u961f\uff0c\u662f\u56fd\u5185\u6e05\u6d17\u884c\u4e1a\u7684\u9886\u5148\u4f01\u4e1a\u4e4b\u4e00\u3002\u5df4\u6d1b\u4ed5\u96c6\u56e2\u5f00\u521b\u4e86\u4e00\u4e9b\u5316\u5b66\u4e2d\u6027\u6e05\u6d17\u65b0\u6280\u672f\u7684\u5e94\u7528\uff0c\u4e3b\u8981\u5305\u62ec\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u9762\uff1a<\/p>\n
1. \u91c7\u7528\u65b0\u578b\u6e05\u6d17\u5242<\/p>\n
\u5df4\u6d1b\u4ed5\u96c6\u56e2\u7279\u522b\u7814\u53d1\u4e86\u4e00\u79cd\u5177\u6709\u5316\u5b66\u4e2d\u6027\u7684\u6e05\u6d17\u5242\uff0c\u4ee3\u66ff\u4e86\u4f20\u7edf\u7684\u5f3a\u9178\u3001\u5f3a\u78b1\u6e05\u6d17\u5242\u3002\u8fd9\u79cd\u65b0\u578b\u6e05\u6d17\u5242\u4e0d\u4ec5\u5177\u6709\u826f\u597d\u7684\u6e05\u6d17\u6548\u679c\uff0c\u8fd8\u53ef\u4ee5\u5b9e\u73b0\u5e9f\u6db2\u65e0\u5371\u5bb3\uff0c\u6297\u8150\u8680\u6027\u80fd\u66f4\u4f73\uff0c\u66f4\u4e0d\u6613\u5bf9\u6e05\u6d17\u7684\u5668\u4ef6\u9020\u6210\u635f\u5bb3\u3002<\/p>\n
2. \u91c7\u7528\u5148\u8fdb\u7684\u6d17\u6da4\u5de5\u827a<\/p>\n
\u5728\u5236\u5b9a\u6e05\u6d17\u65b9\u6848\u65f6\uff0c\u5df4\u6d1b\u4ed5\u96c6\u56e2\u4e0d\u4ec5\u91c7\u53d6\u4e86\u79cd\u7c7b\u7e41\u591a\u7684\u6e05\u6d17\u5242\uff0c\u800c\u4e14\u8fd8\u91c7\u7528\u4e86\u591a\u79cd\u5148\u8fdb\u7684\u6e05\u6d17\u5de5\u827a\uff0c\u5982\u771f\u7a7a\u6e05\u6d17\u3001\u6c14\u4f53\u6e05\u6d17\u3001\u55b7\u5c04\u6e05\u6d17\u7b49\u3002\u8fd9\u4e9b\u5de5\u827a\u53ef\u4ee5\u7b80\u5316\u6e05\u6d17\u6b65\u9aa4\uff0c\u63d0\u9ad8\u6e05\u6d17\u6548\u7387\uff0c\u540c\u65f6\u51cf\u5c11\u5bf9\u73af\u5883\u7684\u635f\u5bb3\u3002<\/p>\n
3. \u4e25\u683c\u7684\u8d28\u91cf\u63a7\u5236<\/p>\n
\u5728\u6e05\u6d17\u8fc7\u7a0b\u4e2d\uff0c\u5df4\u6d1b\u4ed5\u96c6\u56e2\u4e25\u683c\u6309\u7167\u8d28\u91cf\u6807\u51c6\u8fdb\u884c\u751f\u4ea7\u3002\u5b83\u4eec\u5efa\u7acb\u4e86\u5b8c\u6574\u7684\u8d28\u91cf\u4f53\u7cfb\uff0c\u5305\u62ec\u8d28\u91cf\u63a7\u5236\u3001\u8d28\u91cf\u7ba1\u7406\u3001\u8d28\u91cf\u76d1\u7763\u7b49\u73af\u8282\u3002\u8fd9\u53ef\u4ee5\u4fdd\u8bc1\u4ea7\u54c1\u7684\u8d28\u91cf\u548c\u7a33\u5b9a\u6027\u3002<\/p>\n
\u7ed3\u8bba\uff1a<\/p>\n
\u534a\u5bfc\u4f53\u82af\u7247\u6e05\u6d17\u8bbe\u5907\u662f\u63d0\u9ad8\u82af\u7247\u8d28\u91cf\u7684\u5173\u952e\u3002\u672c\u6587\u4ece\u591a\u4e2a\u65b9\u9762\u6df1\u5165\u63a2\u8ba8\u4e86\u534a\u5bfc\u4f53\u82af\u7247\u6e05\u6d17\u8bbe\u5907\u7684\u91cd\u8981\u6027\uff0c\u5e76\u5206\u6790\u4e86\u73b0\u5728\u7684\u6e05\u6d17\u884c\u4e1a\u7684\u6280\u672f\u8d8b\u52bf\u3002\u4ece\u5df4\u6d1b\u4ed5\u96c6\u56e2\u7684\u5316\u5b66\u4e2d\u6027\u6e05\u6d17\u65b0\u6280\u672f\u4e2d\uff0c\u62bd\u79bb\u51fa\u5176\u5bf9\u6e05\u6d17\u884c\u4e1a\u7684\u8d21\u732e\u53ca\u4f18\u52bf\uff0c\u8fdb\u4e00\u6b65\u8bf4\u660e\u4e86\u4f01\u4e1a\u5728\u6b64\u884c\u4e1a\u5904\u4e8e\u9886\u5148\u5730\u4f4d\u3002\u5728\u4eca\u540e\u7684\u6e05\u6d17\u884c\u4e1a\u53d1\u5c55\u4e2d\uff0c\u5e94\u8be5\u7ee7\u7eed\u63a8\u5e7f\u5148\u8fdb\u6280\u672f\u548c\u73af\u4fdd\u578b\u6e05\u6d17\u3002\u540c\u65f6\uff0c\u4f01\u4e1a\u5728\u751f\u4ea7\u4e2d\u5e94\u8be5\u4e25\u683c\u6309\u7167\u8d28\u91cf\u6807\u51c6\u751f\u4ea7\uff0c\u786e\u4fdd\u4ea7\u54c1\u7684\u8d28\u91cf\u548c\u7a33\u5b9a\u6027\u3002<\/p>\n
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